Mann sitzt vor einem Bildschirm mit einer Wafermap. / Man sits in front of screen with a wafer map.

Interactive Wafer Analysis with a Spotfire ActionMod by StatSoft

Semi­con­duc­tor manu­fac­tu­ring is one of the most data-inten­si­ve indus­tries in exis­tence. Every pro­duc­tion step gene­ra­tes huge amounts of pro­cess and test data that must be careful­ly ana­ly­zed to avo­id yield loss and ensu­re qua­li­ty. One of the most important tasks: iden­ti­fy­ing and ana­ly­zing defect pat­terns on wafers.

This is exact­ly whe­re the Wafer Map deve­lo­ped by Stat­Soft comes in — an inter­ac­ti­ve tool for Spot­fi­re that makes engi­neers’ work signi­fi­cant­ly easier. The Wafer Map is imple­men­ted as an Action­Mod in Spot­fi­re. 

What Are ActionMods in Spotfire?

Action­Mods are inter­ac­ti­ve mini-apps that can be direct­ly inte­gra­ted into Spot­fi­re. They extend Spotfire’s func­tion­a­li­ty and make it pos­si­ble to car­ry out com­plex work­flows or ana­ly­ses wit­hout pro­gramming effort.

An Action­Mod can, for exam­p­le:

  • Auto­ma­te work­flows so that recur­ring tasks are com­ple­ted with a sin­gle click,
  • Pro­vi­de input forms and but­tons that allow users to inter­ac­tively con­trol data,
  • Per­form com­plex ana­ly­ses and trans­for­ma­ti­ons of data, such as machi­ne lear­ning algo­rith­ms,
  • Dis­play spe­cia­li­zed visua­liza­ti­ons con­fi­gu­red for spe­ci­fic appli­ca­ti­ons,
  • and thus signi­fi­cant­ly impro­ve usa­bi­li­ty.

For users, this means: less time spent on manu­al data pre­pa­ra­ti­on and more focus on actu­al ana­ly­sis and decis­i­on-making.

Why a Wafer Map for the Semiconductor Industry?

In semi­con­duc­tor manu­fac­tu­ring, it is cru­cial to quick­ly iden­ti­fy defect pat­terns on wafers. The­se pat­terns pro­vi­de clues about:

  • Pro­cess pro­blems in indi­vi­du­al pro­duc­tion steps,
  • Equip­ment defects or cali­bra­ti­on errors,
  • Par­tic­le con­ta­mi­na­ti­on or mask errors,
  • Spa­ti­al­ly recur­ring pat­terns indi­ca­ting sys­te­ma­tic cau­ses.

A clas­sic exam­p­le: clus­ters of defects in cer­tain wafer are­as may indi­ca­te a con­ta­mi­na­ted pro­cess step, while radi­al pat­terns are often lin­ked to tem­pe­ra­tu­re or pres­su­re devia­ti­ons.

The StatSoft Wafer Map ActionMod

With our Wafer Map, engi­neers can visua­li­ze wafer data direct­ly in Spot­fi­re — quick­ly, inter­ac­tively, and wit­hout com­pli­ca­ted addi­tio­nal pro­gramming.

Bene­fits for users:

  • Inter­ac­ti­ve visua­liza­ti­on: Wafers can be dis­play­ed with all defect data or test points. Colors, shapes, and sizes of the points are fle­xi­bly adjus­ta­ble.
  • Drill-down ana­ly­sis: From an over­view of hundreds of wafers down to indi­vi­du­al lay­ers or lot levels.
  • Defect pat­tern reco­gni­ti­on: Typi­cal signa­tures such as edge-ring defects, cen­ter defects, or scratch pat­terns beco­me imme­dia­te­ly visi­ble.
  • Inte­gra­ti­on with Spot­fi­re: Results can be seam­less­ly com­bi­ned with pro­cess data, yield ana­ly­sis, and SPC charts.
  • Ease of use: The Action­Mod is rea­dy to use imme­dia­te­ly, wit­hout addi­tio­nal scripts or exter­nal tools.

This turns a com­plex data task into an easi­ly acces­si­ble, visu­al ana­ly­sis that direct­ly sup­ports all stake­hol­ders.

Conclusion

With the Stat­Soft Wafer Map, we com­bi­ne the fle­xi­bi­li­ty of Spot­fi­re with a solu­ti­on spe­ci­fi­cal­ly deve­lo­ped for the semi­con­duc­tor indus­try. Engi­neers can detect defects fas­ter, pin­point cau­ses more pre­cis­e­ly, and mini­mi­ze yield loss.

Your bene­fit: less time on manu­al data pre­pa­ra­ti­on, more time for real pro­cess impro­ve­ments.

Stat­Soft thus builds a bridge bet­ween modern data analytics and the spe­ci­fic requi­re­ments of semi­con­duc­tor manu­fac­tu­ring — prac­ti­cal, inter­ac­ti­ve, and rea­dy to use imme­dia­te­ly.

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If you have any ques­ti­ons about our pro­ducts or need advice, plea­se do not hesi­ta­te to cont­act us direct­ly.

Tel.: +49 40 22 85 900-0
E-mail: info@statsoft.de

Gui­do Band­holz (Head of Sales)